Downstream/Exhaust Throttle Valves
All major OEMs.
MKS, Nor-Cal, VAT, Tylan General, and others.
All types and toolsets.
KF40, KF50, NW80, NW100 – all sizes.
Rack-n-pinion, direct drive and belt drive types.
Isolating and non-isolating butterfly flappers including Teflon seal varieties.
Integrated and remote controller configurations.
Full recondition and repair, ability to source and replace all components.
Pendulum Valves
VAT and Nor-Cal
Complete recondition and function testing.
Solid State Temperature Control Devices
SSC, LAUDA and others.
Full diagnostic, disassembly, and component repair.
Pump and thermoelectric components function test.
Power Supply, PWM Boards replacement and repair.
Temperature setpoint and leak testing under load with DI water and fluorinated heat exchange fluids.
APC Valves and Iso Valves
CKD, SMC, HVA, MKS, Kitz and others.
Heated and Non-heated.
Heater jacket testing and repair.
Simple isolating and complex CKD APC varieties.
PWM modulated types for CVD and ALD applications.
Complete teardown with full scope recondition and repair including PWMs, bellows, and diaphragm replacement.
Gate valves/Slit Valves/L-Motion Pneumatic Actuators
SMC, VAT, HVA and other OEMs – complete recondition scope, bellows replacement.
VAT - Complete teardown and recondition, O-rings and bearings replacement, function testing and electronic components repair.
Other Semiconductor Components and Sub-assemblies.
Novellus Spindles
Pin Lift Actuators
Ferrofluid Seals and Cartridges
Feedthrough Assemblies